SPIE Advanced Lithography + Patterning Exhibition
February 22 - 26, 2026

SPIE Advanced Lithography + Patterning gathers leading experts in semiconductor lithography, metrology and patterning technologies, from optical lithography to EUV and advanced process integration. With ever smaller feature sizes and tighter tolerances, the requirements for multilayer coatings and high-precision optical components continue to increase.

Materion Balzers Optics provides dielectric and metallic thin-film optical coatings, anti-reflection coatings and complete optical sub-assemblies covering the UV to far IR range. These solutions support optical systems for advanced lithography and inspection.

We welcome you to visit us at our booth to discuss your requirements.

Location
San Jose McEnery Convention Center
150 W San Carlos Street
San Jose, California 95113

Materion Balzers Optics Booth
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Opening hours (Exhibition)
Tuesday, February 24
10am - 5pm

Wednesday, February 25
10am - 4pm