Sub-micron level Patterning


Single and multimaterial stacks


Materion Balzers Optics seamlessly integrates ultra-high-resolution patterning with advanced coating technologies. Our unique advantage lies in delivering a comprehensive suite of submicron patterning solutions, enabling the creation of optical components with features and tolerances at the cutting edge – meeting the needs of next-generation photonics, sensing, and imaging applications.

Our holistic approach combines sub-micron patterning, filter coatings, and assembly under one roof, ensuring optimal compatibility and performance. Our state-of-the-art processes eliminate patterning artifacts. Plus, our engineers specialize in the design and fabrication of optical subgroups at the sub-micron scale, maximizing the benefits of our advanced optical components.

Single and multimaterial stacks


Benefits

  • Integrated Solutions: Seamlessly combine sub-micron patterning with high-performance coatings, assembly & singulation
  • Excellentdevelopmentsupport
  • High capability on patternable materials. Including multi material stack patterns.
  • Low stress



Applications

  • Calibration targets
  • Beam Shaping (Apodizer)
  • Reticles
  • Projection


Technical Data

Dimensions

Substrate Size

up to 8” substrates

Minimal feature size

500 nm

Feature accuracy

+/- 100 nm

Overlay accuracy

+/- 300 nm


Defects

ISO 10110-7

5/3x0.004

Patterns

≤ 1 um pin dots


Typical Materials

Absorptive patterns

Black Chrome, black laquer

Reflective patterns

Chrome, Titanium, Aluminium, Silver

Mirror patterns

Silflex, Alflex

Application: Camera Calibration for Metrology Equipment
Black chrome and chrome stacked on same side of glass plate. Ensuring high contrast by eliminating glass influence for calibration targets.
Black chrome and chrome stacked on same side of glass plate. Ensuring high contrast by eliminating glass influence for calibration targets.
Contrast of Black Chrome vs. Chrome
High and homogenious contrast over full visible spectrum.