Laser Scanning Mirrors

Mirrors for High Performance Galvano Scanning Applications

Materion Balzers Optics offers a large variety of customer specific Laser scanning mirrors as they are applied for example in mirror galvanometer scanner units. Coated wih the unique metallic Silflex™ material, these mirrors are well suited for a wavelength range from 450nm up to 5000nm with a possible optimization for selected ranges from the UV to the IR. Especially an optimized design with an reflectivity >99% @1064nm can be offered for all applications in conjuction with Nd:YAG Laser units. Since Silflex generates a lower level of stress in the thin films, the substrate flatness accuracy is not affected.

Benefits

High reflectivity over a large angular range
Customized shape on Silicon or Fused Silica
Lightweight – considering the surface flatness
No wavelength shift and good environmental stability
Wavelength dependency design optimization

Technical Data

Typical:

R ≥ 98% avg for 450-5000nm for 22-58° q-pol
R ≥ 99% abs for 1064nm for 22-58° q-pol
Flatness: PV < 150nm over CA Ø10mm
Cosmetic: 5/3x0.16
LIDT: 1J/cm² (10ns pulse)
Customized Silicon or fused silica substrates

Environmental Resistance and Durability

The coating withstands the following tests
on glass substrates

Temperature (MIL-M-13508 C, para. 4.4.4)

5 h each at – 62 °C and + 71 °C

Hardness (MIL-M-13508 C, para. 4.4.5)

50 strokes with cheesecloth

Adherence (MIL-M-13508 C, para. 4.4.6)

Scotch tape test

Humidity (MIL-M-13508 C, para. 4.4.7)

24 h at 49 °C r.h. 95%

Salt Fog (MIL-M-13508 C, para. 4.4.8)

24 h salt spray 4.5% NaCl

Cleaning

Silflex™ withstands immersion in acetone, ethanol, etc. As specified in MIL-C48497, para 4.5.4.2. It can be cleaned with a soft cotton cloth soaked in mild soapy water, ethanol or other non-abrasive substances.

Applications

Typical these mirrors steer a processing laser over a range up to ± 30° in the X- and Y-axes. Scanning speed easily achieves the range of several kHz. Therefore, galvano scanning mirrors have to be optimized in terms of mechanical and optical properties to suit both, the forces of movement and the stress generated by the power of the processing laser. The shape, thickness and material can be customized, other wavelengths are upon request.

Typical reflectance curve for q-pol, measured at two angles of incidence. Design optimized for 1064nm.

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